@book{800231,
  author = {David Seiler and Alain Diebold and Robert McDonald and Amal Chabli and Erik Secula},
  title = {Frontiers of Characterization and Metrology for Nanoelectronics: 2011},
  year = {2011},
  number = {1395},
  month = {2011-12-28 00:12:00},
  publisher = {American Institute of Physics, Melville, NY},
  language = {en},
}