@article{79956,
  author = {Rick Paul and David Simons and William Guthrie and John Lu},
  title = {Radiochemical Neutron Activation Analysis for Certification of Ion-Implanted Phosphorus in Silicon},
  year = {2003},
  number = {75},
  month = {2003-07-11},
  publisher = {Analytical Chemistry},
  language = {en},
}