@conference{797876,
  author = {Daniel Josell and S Kim and Daniel Wheeler and Thomas Moffat and S Pyo},
  title = {Quantifying Superconformal filling of the Submicrometer Features Through Surfactant Catalyzed Chemical Vapor Deposition},
  year = {2003},
  number = {No. 8},
  month = {2003-04-01 00:04:00},
  publisher = {Chemical Vapor Deposition, International Conference | 16th | | Electrochemical Society, Paris, 1, FR},
  language = {en},
}