@article{797701,
  author = {Siddarth Sundaresan and M Rao and Yong-lai Tian and John Schreifels and M. Wood and K Jones and Albert Davydov},
  title = {Comparison of Solid-State Microwave Annealing With Conventional Furnace Annealing of Ion-Implanted SiC},
  year = {2021},
  month = {2021-10-12 15:10:23},
  publisher = {Journal of Electronic Materials},
  language = {en},
}