@article{797666,
  author = {M Nieto and J Allain and V Titov and M Hendricks and A Hassanein and D Rokusek and C Chrobak and Charles Tarrio and Yaniv Barad and Steven Grantham and Thomas Lucatorto and Bryan Rice},
  title = {Effect of Xenon Bombardment on Ruthenium-Coated Grazing Incidence Collector Mirror Lifetime for EUV Lithography},
  year = {2006},
  number = {100},
  month = {2006-09-01 00:09:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}