@article{797636, author = {A Mann and J Tapson and D van Heerden and A Lewis and Daniel Josell and Timothy Weihs}, title = {Apparatus to Measure Wafer Curvature for Multilayer Systems in a Vacuum Furnace}, year = {2002}, number = {73}, month = {2002-04-01 00:04:00}, publisher = {Review of Scientific Instruments}, language = {en}, }