@article{797461,
  author = {L Gan and Romel Gomez and Audie Castillo and P Chen and Cedric Powell and William Egelhoff Jr.},
  title = {Ultra-Thin Aluminum Oxide as a Thermal Oxidation Barrier on Metal Films},
  year = {2002},
  number = {415},
  month = {2002-08-01 00:08:00},
  publisher = {Thin Solid Films},
  language = {en},
}