@article{797276,
  author = {V. Lee and Christopher Soles and D Liu and Barry Bauer and Eric Lin and Wen-Li Wu and A Grill},
  title = {Structural Characterization of Porous Low-K Thin Films Prepared by Different Processing Techniques Using X-Ray Porosimetry},
  year = {2004},
  number = {95},
  month = {2004-03-01 00:03:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852200},
  language = {en},
}