@article{797211,
  author = {D. Giubertoni and Giancarlo Pepponi and Salvatore Gennaro and Massimo Bersani and M Sahiner and Stephen Kelty and Roisin Doherty and Majeed Foad and Max Kah and Karen Kirkby and Joseph Woicik},
  title = {Correlation of Local Structure and Electrical Activation in Arsenic Ultra Shallow Junctions in Silicon},
  year = {2008},
  number = {104},
  month = {2008-11-05 00:11:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854133},
  language = {en},
}