@article{797201,
  author = {V. Lee and Eric Lin and Barry Bauer and Wen-Li Wu and B Hwang and W Gray},
  title = {Characterization of Chemical-Vapor-Deposited Low-K Thin Films Using X-Ray Porosimetry},
  year = {2003},
  number = {82},
  month = {2003-02-01 00:02:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852082},
  language = {en},
}