@conference{797086, author = {Wen-Li Wu and Vivek Prabhu and Eric Lin}, title = {Identifying Materials Limits of Chemically Amplified Photoresists}, year = {2007}, number = {6519}, month = {2007-02-25 00:02:00}, publisher = {Proceedings of SPIE, San Jose, CA, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852749}, language = {en}, }