@conference{796666,
  author = {Bala Muralikrishnan and Jack Stone Jr. and John Stoup},
  title = {Enhanced Capabilities of the NIST Fiber Probe for Microfeature Metrology},
  year = {2006},
  month = {2006-01-01 00:01:00},
  publisher = {Proceedings of the Annual Meeting of the American Society for Precision Engineering 2006, Monterey, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823213},
  language = {en},
}