@misc{796596,
  author = {Donna Le and Nicholas Dagalakis and Jason Gorman and Jae Yoo},
  title = {Performance of a Nanopositioner Controller Filter Compensator},
  year = {2009},
  month = {2009-08-12 00:08:00},
  publisher = {Precision Meso/Micro Systems for Nanomanufacturing},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824745},
  language = {en},
}