@conference{79651,
  author = {Kenneth Kreider and Dean Ripple and D DeWitt},
  title = {Calibration of Thin-Film Thermocouples on Silicon Wafers},
  year = {1999},
  month = {1999-06-01},
  publisher = {TEMPMEKO '99, The 7th International Symposium on Temperature and Thermal Measurements in Industry and Science, Delft, NL},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830629},
  language = {en},
}