@article{796376, author = {Q Pan and G Gonzalez and R Composto and William Wallace and B Arkles and L Figge and D Berry}, title = {Spin-on-Glass Thin Films Prepared From a Novel Polysilsesquioxane by Thermal and Ultraviolet-Irradiation Methods}, year = {1999}, number = {345}, month = {1999-01-01 00:01:00}, publisher = {Thin Solid Films}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851493}, language = {en}, }