@article{79636,
  author = {Kenneth Kreider and John Gillen},
  title = {High Temperature Materials for Thin-Film Thermocouples on Silicon Wafers},
  year = {2000},
  number = {376},
  month = {2000-11-01},
  publisher = {Thin Solid Films},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830660},
  language = {en},
}