@conference{796266, author = {F Chien and John Dagata and W Hsieh and S Gwo}, title = {Nanomachining of Si with Si3N4 Masks Patterned by Scanning}, year = {2001}, month = {2001-11-01 00:11:00}, publisher = {Proceedings of 5th Conference of Nanoengineering and Microsystem Technology, Industrial Technology Research Institute, Hsinchu, 1, TW}, language = {en}, }