@conference{796226,
  author = {V Tsai and Theodore Vorburger and P Sullivan and Ronald Dixson and Richard Silver and Edwin Williams and J Schneir},
  title = {Height Calibration of Atomic Force Microscopes Using Silicon Atomic Step Artifacts},
  year = {1996},
  number = {14},
  month = {1996-01-01 00:01:00},
  publisher = {Proceedings of American Society for Precision Engineering, Unknown, 1, USA},
  language = {en},
}