@conference{796066,
  author = {R Koning and Ronald Dixson and Joseph Fu and V Tsai and Theodore Vorburger},
  title = {Improving Step Height and Pitch Measurements Using the Calibrated Atomic Force Microscope},
  year = {1998},
  month = {1998-01-01 00:01:00},
  publisher = {Proceedings of 3rd Seminar on Quantitative Microscopy, PTB, Braunschweig, 1, GE},
  language = {en},
}