@conference{795716,
  author = {Michael Cresswell and John Bonevich and T Headley and Richard Allen and Lucille Giannuzzi and Sarah Everist and Rathindra Ghoshtagore and Patrick Shea},
  title = {Comparison of Electrical CD Measurements and Cross-Section Lattice-Plane Counts of Sub-Micrometer Features Replicated in (100) Silicon-on-Insulator Material},
  year = {2000},
  number = {3998},
  month = {2000-06-01 00:06:00},
  publisher = {SPIE - The International Society for Optical Engineering, Gaithersburg, MD, USA},
  language = {en},
}