@conference{795666,
  author = {Michael Cresswell and Ronald Dixson and William Guthrie and Richard Allen and Christine Murabito and Brandon Park and Joaquin Martinez and Amy Hunt},
  title = {Critical Dimension Reference Features with Sub-Five Nanometer Uncertainty},
  year = {2005},
  number = {5752},
  month = {2005-05-30 00:05:00},
  publisher = {SPIE 30th International Symposium Microlithography, San Jose, CA, USA},
  language = {en},
}