@misc{795661,
  author = {Michael Cresswell and Richard Allen and Ronald Dixson and William Guthrie and Christine Murabito and Brandon Park and Joaquin Martinez},
  title = {Report of Investigation of RM 8111: Single-Crystal Critical Dimension Prototype Reference Materials},
  year = {2005},
  month = {2005-03-02 00:03:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}