@conference{795576,
  author = {Chidubem Nwokoye and Mona Zaghloul and Michael Cresswell and Richard Allen and Christine Murabito},
  title = {A New Critical Dimension Metrology for Chrome-on-Glass Substrates Based ons-Parameter Measurements Extracted from Coplanar Waveguide Test Structures},
  year = {2006},
  month = {2006-10-01 00:10:00},
  publisher = {SPIE, Monterey, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32422},
  language = {en},
}