@conference{795561,
  author = {John Suehle and Eric Vogel and Monica Edelstein and Curt Richter and Nhan Nguyen and Igor Levin and Debra Kaiser and Hanchang Wu and J Bernstein},
  title = {Challenges of High-[kappa] Gate Dielectrics for Future MOS Devices},
  year = {2001},
  month = {2001-05-13 00:05:00},
  publisher = {Proc., 2001 International Symposium on Plasma and Process-Induced Damage, Monterey, CA, USA},
  language = {en},
}