@conference{795481,
  author = {Byron Shulver and Andrew Bunting and Alan Gundlach and Les Haworth and Alan Ross and A. Smith and Anthony Snell and J. Stevenson and Anthony Walton and Michael Cresswell and Richard Allen},
  title = {Extraction of Sheet Resistance and Linewidth from All-Copper ECD Test-Structures Fabricated from Silicon Preforms},
  year = {2007},
  month = {2007-03-22 00:03:00},
  publisher = {2007 International Conference on Microlectronic Test Structures, Tokyo, 1, JA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32582},
  language = {en},
}