@conference{795426,
  author = {Myongjai Lee and Jen-Hau Cheng and Kristine Bertness and Norman Sanford and Dragos Seghete and Steven George and Y.C. Lee},
  title = {Atomic layer deposition enabled interconnect technology for vertical nanowire array devices},
  year = {2009},
  month = {2009-06-20 00:06:00},
  publisher = {Transducers 2009, Denver, CO, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902321},
  language = {en},
}