@conference{795296,
  author = {Michael Cresswell and E. Bogardus and Joaquin Martinez and Marylyn Bennett and Richard Allen and William Guthrie and Christine Murabito and B Am ende and Loren Linholm},
  title = {CD Reference Materials for Sub-Tenth Micrometer Applications},
  year = {2002},
  number = {4689},
  month = {2002-06-01 00:06:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Santa Clara, CA, USA},
  language = {en},
}