@conference{795171,
  author = {J. Vahakangas and Markku Lahti and M Chang and H Edward and C Machala and R Martin and V Zavyalov and J McMurray and C. Williams and P DeWolf},
  title = {Dopant Characterization Round-Robin Study Performed on Two-Dimensional Test Structures Fabricated at Texas Instruments},
  year = {1998},
  month = {1998-12-31 00:12:00},
  publisher = {Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
  language = {en},
}