@conference{795166,
  author = {Joseph Kopanski and Jay Marchiando and Brian Rennex},
  title = {Scanning Capacitance Microscopy for Measuring Device Carrier Profiles beyond the 100 nm Generation},
  year = {2000},
  month = {2000-12-31 00:12:00},
  publisher = {Tech. Dig., 2000 International Microprocesses and Nanotechnology Conference,  Tokyo, 1, JA},
  language = {en},
}