@conference{795036, author = {Michael Cresswell and N. Arora and Richard Allen and Christine Murabito and Curt Richter and Ashwani Gupta and Loren Linholm and D. Pachura and P. Bendix}, title = {Test Chip for Electrical Linewidth of Copper-Interconnection Features and Related Parameters}, year = {2001}, number = {14}, month = {2001-02-06 00:02:00}, publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Kobe, 1, JA}, language = {en}, }