@article{795031,
  author = {C Silvestre and P Thompson and G Jernigan and David Simons},
  title = {Boron Incorporation With and Without Atomic Hydrogen During the Growth of Doped Layers on Si(100)},
  year = {1998},
  number = {16},
  month = {1998-07-01 00:07:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}