@article{794666, author = {Heather Chen-Mayer and George Lamaze and Kevin Coakley and Sushil Satija}, title = {Two Aspects of Thin Film Analysis: Boron Profile and Scattering Length Density Profile}, year = {2003}, number = {505}, month = {2003-06-01 00:06:00}, publisher = {Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment}, language = {en}, }