@conference{794656, author = {Michael Cresswell and Nadine Guillaume and Richard Allen and William Guthrie and Rathindra Ghoshtagore and James OwenI II and Z. Osborne and N. Sullivan and Loren Linholm}, title = {Extraction of Sheet-Resistance from Four-Terminal Sheet Resistors in Monocrystalline Films Having Non-Planar Geometries}, year = {1998}, month = {1998-12-31 00:12:00}, publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Kanazawa, US}, language = {en}, }