@article{794501,
  author = {D Dwight and M Rao and O Holland and G Kelner and P Chi and J Kretchmer and M Ghezzo},
  title = {Nitrogen and Aluminum Implantation in High Resistivity Silicon Carbide},
  year = {1997},
  number = {82},
  month = {1997-02-12 00:02:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}