@conference{794206,
  author = {Joseph Kopanski and Jay Marchiando and John Albers and Brian Rennex},
  title = {Comparison of Measured and Modeled Scanning Capacitance Microscopy Images Across P-N Junctions},
  year = {1998},
  month = {1998-07-01 00:07:00},
  publisher = {Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
  language = {en},
}