@article{794176,
  author = {Nhan Nguyen and Curt Richter and Yong Cho and G Alers and L. Stirling},
  title = {Effects of High Temperature Annealing on the Dielectric Function of Ta<sub>2</sub>O<sub>5</sub> Films Observed by Spectroscopic Ellipsometry},
  year = {2000},
  number = {77},
  month = {2000-11-06 00:11:00},
  publisher = {Applied Physics Letters},
  language = {en},
}