@article{793976, author = {W Entley and J Langan and B Felker and Mark Sobolewski}, title = {Optimizing Utilization Efficiencies in Electronegative Discharges: The Importance of the Impedance Phase Angle}, year = {1999}, number = {86}, month = {1999-11-01 00:11:00}, publisher = {Journal of Applied Physics}, language = {en}, }