@article{793971,
  author = {L Robertson and M Law and K. Jones and L Rubin and J Jackson and P Chi and David Simons},
  title = {Correlation of End-of-Range Damage Evolution and Transient Enhanced Diffusion of Boron in Regrown Silicon},
  year = {1999},
  number = {75},
  month = {1999-12-01 00:12:00},
  publisher = {Applied Physics Letters},
  language = {en},
}