@article{793956,
  author = {Maritoni Litorja and Steven Buntin},
  title = {Oxidation of Deuterium-, Acetylene-, and Ethylene-Terminated Si(100) by Atomic Oxygen},
  year = {2002},
  number = {20},
  month = {2002-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}