@conference{793556,
  author = {J Scott and Eric Windsor and D Brady and J Canterbury and A. Karamcheti and W Chism and A Diebold},
  title = {Gate Dielectric Thickness Metrology Using Transmission Electron Microscopy},
  year = {2000},
  number = {550},
  month = {2000-01-01 00:01:00},
  publisher = {Characterization and Metrology for ULSI Technology Conference, xxxx, US},
  language = {en},
}