@conference{791901, author = {Papa Amoah and Jesus Perez and Yaw Obeng}, title = {Application of Broadband RF Metrology to Integrated Circuit Interconnect Reliability Analyses: Monitoring Copper Interconnect Corrosion in 3D-ICs}, year = {2020}, month = {2020-06-04 00:06:00}, publisher = {2020 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, April 6-9, EDINBURGH, UNITED KINGDOM, Edinburgh, UK}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929468}, doi = {https://doi.org/10.1109/ICMTS48187.2020.9107926.}, language = {en}, }