@article{791671,
  author = {Eric Chason and Alison Engwal and Fei Pei and Manon Lafouresse and Ugo Bertocci and Gery Stafford and Joseph Murphy and Catherine Lenihan and D. Buckley},
  title = {Understanding residual stress in electrodeposited Cu thin films},
  year = {2013},
  number = {160},
  month = {2013-12-13 00:12:00},
  publisher = {Journal of the Electrochemical Society},
  doi = {https://doi.org/10.1149/2.048312jes},
  language = {en},
}