@article{791406,
  author = {Alexander Tselev and Jeffrey Fagan and Andrei Kolmakov},
  title = {In-situ near-field probe microscopy of plasma processing},
  year = {2018},
  number = {113},
  month = {2018-12-27 00:12:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925358},
  doi = {https://doi.org/10.1063/1.5049592},
  language = {en},
}