@article{789046,
  author = {David Bishop and Flavio Pardo and Cris Bolle and Randy Giles and Vladimir Aksyuk},
  title = {Silicon Micromachines for Fun and Profit},
  year = {2012},
  number = {169},
  month = {2012-12-12 00:12:00},
  publisher = {Journal of Low Temperature Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917882},
  language = {en},
}