@article{78861, author = {Heather Patrick and Thomas Germer and Yifu Ding and Hyun and Lee Richter and Christopher Soles}, title = {Scatterometry for in situ measurement of pattern reflow in nanoimprinted polymers}, year = {2008}, number = {93}, month = {2008-12-09}, publisher = {Applied Physics Letters}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=900878}, language = {en}, }