@conference{78846,
  author = {Heather Patrick and Thomas Germer},
  title = {Progress Towards Traceable Nanoscale Optical Critical Dimension Metrology for Semiconductors},
  year = {2007},
  number = {6672},
  month = {2007-10-01},
  publisher = {Proceedings of the SPIE Meeting | Annual | 2007 |},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841133},
  language = {en},
}