@conference{788201,
  author = {Yong Kim and Nicholas Dagalakis and Satyandra Gupta},
  title = {Design, fabrication and characterization of a single-layer out-of-plane electrothermal actuator for SOI-MEMS Applications},
  year = {2012},
  month = {2012-05-03 00:05:00},
  publisher = {2012 Performance Metrics for Intelligent Systems Workshop, College Park, MD, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910830},
  language = {en},
}