@conference{787481,
  author = {Vladimir Ukraintsev and Ndubuisi Orji and Theodore Vorburger and Ronald Dixson and Joseph Fu and Richard Silver},
  title = {On CD-AFM bias related to probe bending},
  year = {2012},
  month = {2012-04-09 00:04:00},
  publisher = {Metrology, Inspection, and Process Control for Microlithography XXVI, Proceedings of SPIE Volume: 8324, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910903},
  language = {en},
}