@article{787361,
  author = {S. Baek and J. Park and D. Kim and Vladimir Aksyuk and R. Das and S. Bu and D. Felker and J. Lettieri and V Vaithyanathan and S. Bharadwaja and N. Bassiri-Gharb and Y. Chen and H. Sun and C. Folkman and H. Jang and D. Kreft and S Streiffer and R. Ramesh and X Pan and S Trolier-McKinstry and Darrell Schlom and M. Rzchowski and R. Blick and C. Eom},
  title = {Giant piezoelectricity on Si for hyperactive MEMS},
  year = {2011},
  number = {334},
  month = {2011-11-18 00:11:00},
  publisher = {Science},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907279},
  language = {en},
}