@conference{787036,
  author = {D Chen and D DeWitt and K Kreider and Benjamin Tsai and W Kimes},
  title = {Effects of Wafer Emissivity on Rapid Thermal Processing Temperature Measurement},
  year = {2002},
  month = {2002-01-01 00:01:00},
  publisher = {RTP 2002 , Vancouver, 1, CA},
  language = {en},
}